Strained silicon nFET and silicon germanium pFET on same wafer

ABSTRACT

Various embodiments form silicon and silicon germanium fins on a semiconductor wafer. In one embodiment a semiconductor wafer is obtained. The semiconductor wafer comprises a substrate, a dielectric layer, and a semiconductor layer including silicon germanium (SiGe). At least one SiGe fin is formed from at least a first SiGe region of the semiconductor layer in at least one PFET region of the semiconductor wafer. Strained silicon is epitaxially grown on at least a second SiGe region of the semiconductor layer. At least one strained silicon fin is formed from the strained silicon in at least one NFET region of the semiconductor wafer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims priority from prior U.S.patent application Ser. No. 13/800,984, filed on Mar. 13, 2013, theentire disclosure of which is herein incorporated by reference in itsentirety.

BACKGROUND

The present invention generally relates to semiconductor devices, andmore particularly relates semiconductor wafers comprising both strainedsilicon nFET fins and silicon germanium pFET fins.

As integrated circuits continue to scale downward in size, the finFET(fin field effect transistor) is becoming an attractive device for usewith smaller nodes, e.g., the 22 nm node and beyond. In a finFET, thechannel is formed by a semiconductor fin and a gate electrode is locatedon at least two sides of the fin. Due to the advantageous feature offull depletion in a finFET, the increased number of sides on which thegate electrode controls the channel of the finFET enhances thecontrollability of the channel in a finFET compared to a planar MOSFET.The improved control of the channel allows smaller device dimensionswith less short channel effects as well as larger electrical currentthat can be switched at high speeds. A finFET device generally hasfaster switching times, equivalent or higher current density, and muchimproved short channel control than planar CMOS technology utilizingsimilar critical dimensions. However, one main detractor for realizingsuch finFET device technology is the ineffectiveness of conventionalstress elements that are applied to such devices.

BRIEF SUMMARY

In one embodiment, a method for forming silicon and silicon germaniumfins on a semiconductor wafer is disclosed. The semiconductor wafercomprises a substrate, a dielectric layer formed on the substrate, and asemiconductor layer formed on the dielectric layer. The method comprisesforming a semiconductor wafer. The semiconductor wafer comprises asubstrate, a dielectric layer formed on the substrate, and asemiconductor layer formed on the dielectric layer. The semiconductorlayer comprises silicon germanium (SiGe) layer formed on the dielectriclayer. At least one SiGe fin is formed from at least a first SiGe regionof the semiconductor layer. Strained silicon is epitaxially grown on atleast a second SiGe region of the semiconductor layer. At least onestrained silicon fin is formed from the strained silicon in at least oneNFET region of the semiconductor wafer.

In another embodiment, a semiconductor wafer is disclosed. Thesemiconductor wafer comprises a substrate and a dielectric layer formedon the substrate. A plurality of fins is formed on the dielectric layer.At least a first fin comprises silicon germanium formed within a PFETregion of the semiconductor wafer. At least a second fin comprisesstrained silicon formed within the NFET region of the semiconductorwafer.

In yet another embodiment, a non-transitory computer readable medium isdisclosed. The non-transitory computer readable medium is encoded with aprogram for fabricating strained and relaxed silicon and silicongermanium fins on a semiconductor wafer. The program comprisesinstructions configured to perform a method. The semiconductor wafercomprises a substrate, a dielectric layer formed on the substrate, and asemiconductor layer formed on the dielectric layer. The method comprisesforming a semiconductor wafer. The semiconductor wafer comprises asubstrate, a dielectric layer formed on the substrate, and asemiconductor layer formed on the dielectric layer. The semiconductorlayer comprises silicon germanium (SiGe) layer formed on the dielectriclayer. At least one SiGe fin is formed from at least a first SiGe regionof the semiconductor layer. Strained silicon is epitaxially grown on atleast a second SiGe region of the semiconductor layer. At least onestrained silicon fin is formed from the strained silicon in at least oneNFET region of the semiconductor wafer.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The accompanying figures where like reference numerals refer toidentical or functionally similar elements throughout the separateviews, and which together with the detailed description below areincorporated in and form part of the specification, serve to furtherillustrate various embodiments and to explain various principles andadvantages all in accordance with the present invention, in which:

FIG. 1 is a cross-sectional diagram illustrating a semiconductor wafercomprising a dielectric layer, a semiconductor layer, a pad layer, and amandrel layer according to one embodiment of the present invention;

FIG. 2 is a cross-sectional diagram illustrating a mask layer depositedover portions of the mandrel layer to create a plurality of mandrelsaccording to one embodiment of the present invention;

FIG. 3 is a cross-sectional diagram illustrating a spacer materialdeposited over the plurality of mandrels according to one embodiment ofthe present invention;

FIG. 4 is a cross-sectional diagram illustrating sidewall spacers oneach of the plurality of mandrels and at least one mandrel having beenmasked with a masking layer according to one embodiment of the presentinvention;

FIG. 5 is a cross-sectional diagram illustrating the masked mandrel ofFIG. 4 after the masking layer has been removed, and the unmaskedmandrels of FIG. 4 after having their sidewall spacers removed andsubsequently masked by a masking layer according to one embodiment ofthe present invention;

FIG. 6 is a cross-sectional diagram illustrating the unmasked mandrel ofFIG. 5 having been removed according to one embodiment of the presentinvention;

FIG. 7 is a cross-sectional diagram illustrating the masking layershaving been removed from the masked mandrels of FIG. 6, and exposedportions of the pad layer having been etched according to one embodimentof the present invention;

FIG. 8 is a cross-sectional diagram illustrating portions of thesemiconductor layer of the wafer having been etched forming silicongermanium fins within a PFET region(s) of the semiconductor wafer andsemiconductor regions within NFET regions of the semiconductor waferaccording to one embodiment of the present invention;

FIG. 9 is a cross-sectional diagram illustrating a masking layer havingbeen deposited over the silicon germanium fins and the semiconductorregions according to one embodiment of the present invention;

FIG. 10 is a cross-sectional diagram illustrating a masking layer havebeen formed over the SiGe fins according to one embodiment of thepresent invention;

FIG. 11 is a cross-sectional diagram illustrating the masking layerhaving been removed from the semiconductor regions and the masking layerhaving been removed from the silicon germanium fins according to oneembodiment of the present invention;

FIG. 12 is a cross-sectional diagram illustrating strained siliconhaving been epitaxially grown on the semiconductor regions according toone embodiment of the present invention;

FIG. 13 is a cross-sectional diagram illustrating the semiconductorregions having been removed forming strained silicon fins according toone embodiment of the present invention;

FIG. 14 is a cross-sectional diagram illustrating the masking layerhaving been removed from the silicon germanium fins according to oneembodiment of the present invention;

FIG. 15 is an operational flow diagram illustrating one example of aprocess for fabricating silicon and silicon germanium fins on the samesemiconductor wafer according to one embodiment of the presentinvention; and

FIG. 16 is a flow diagram of a design process used in semiconductordesign, manufacture, and/or test.

DETAILED DESCRIPTION

As semiconductor devices continue to scale stress engineering fromexternal stressors becomes more challenging due to the pitch scaling. Astrained silicon substrate can be utilized to more efficiently generatethe channel strain necessary to achieve high mobility for carriertransport. In addition, a silicon germanium (SiGe) substrate can beutilized for pFET devices for reducing their work function to reachtargeted device threshold voltages. Integrating both types of substrates(strained silicon for nFET devices, SiGe for pFET devices) on the samewafer can be challenging. However, one or more embodiments discussedbelow provide methods and structures for forming strained silicon NFETfins and silicon germanium PFET fins on the same wafer withoutsignificantly increasing the process complexity.

It is to be understood that various embodiments are described in termsof a given illustrative architecture having a semiconductor-on-insulator(SOI) wafer; however, other architectures, structures, substratematerials and process features and steps may be varied within the scopeof the present invention.

Referring now to the drawings in which like numerals represent the sameor similar elements and initially to FIG. 1, a wafer 102 is shown. Thewafer 102, in one embodiment, is a semiconductor-on-insulator (SOI)wafer having a substrate (not shown) comprising bulk silicon, germanium,gallium arsenide, or any other substrate material. A dielectric layer104 is grown or formed on the substrate. The dielectric layer 104, inone embodiment, comprises a buried oxide layer (BOX) or other dielectricmaterial. A semiconductor layer 106 comprising silicon germanium (SiGe)is grown or formed on the dielectric layer 104. In one embodiment, thecontent of Ge within the semiconductor layer 106 is 20% to 30%. However,other percentages of Ge content within the semiconductor layer 106 areapplicable as well.

In one embodiment, a pad/capping layer 108 is formed on thesemiconductor 106. It should be noted that in other embodiments, thepad/capping layer 108 is formed during or after a fin patterningprocess. The pad layer 108, in one embodiment, comprises an oxide (e.g.,silicon dioxide) or a nitride (e.g., silicon nitride). Other materialsmay also be employed such as (but not limited to) organic dielectrics,etc. A mandrel layer 110 is formed on the pad layer 108. The mandrellayer 110 may include silicon (e.g., polycrystalline silicon(polysilicon), amorphous silicon) and may be plasma-enhanced chemicalvapor deposition (PECVD) polysilicon or amorphous silicon, or othersuitable material.

A blocking/masking layer 212 is formed on the mandrel layer 110, whichis subsequently patterned and etched, as shown in FIG. 2. Theblocking/masking layer 212 is employed as a mask to etch the mandrellayer 110. The blocking/masking layer 212, in one embodiment, comprisesa photoresist material or hard mask such as (but not limited to) siliconnitride, oxide, oxinitride, etc. After the mandrel layer 110 is etchedthe blocking/masking layer 212 is removed leaving a plurality ofmandrels 314, 316, 318 on the pad layer 108, as shown in FIG. 3. In anembodiment where the pad layer 108 is formed during a subsequentprocess, the mandrels 314, 316, 318 are formed on the semiconductorlayer 106. The mandrels 314, 316, 318 provide a corrugated topology onwhich spacers are formed using SIT spacer formation. FIG. 3 also showsthat a spacer material 320 is deposited over and around the mandrels314, 316, 318 and on a top surface of the pad layer 108 (if formed). Inone embodiment, the spacer material 320 comprises nitride, but othermaterials are applicable as well.

The spacer material 320 is etched to form spacers 422, 423 on thesidewalls of each of the mandrels 314, 316, 318 using a sidewall imagetransfer (SIT) spacer formation etch/process, as shown in FIG. 4. TheSIT spacer etch is a directional reactive ion etch (RIE). The SIT spaceretch removes material from horizontal surfaces faster than it removesmaterial from vertical surfaces, allowing for relative precision inspacer thickness formation. FIG. 4 further shows that after the sidewallspacers 422, 423 are formed a masking/resist material 424 is formed overthe region(s) 426 of the wafer 102 corresponding to pFET devices. Forexample, the masking/resist material 424 can be formed over the padlayer 108 and the mandrels 314, 316, 318 including their spacers 422,423. The masking/resist material 424 is then lithographically patternedsuch that only masking/resist material 424 remains over mandrel(s) 316including its spacer 422, 423 within the PFET region(s) 426 of the wafer102. The mandrels 314, 318 in the nFET regions 428, 430 of the wafer 102are left exposed.

An etching process is then performed to remove the spacers 422, 423 ofthe exposed mandrels 314, 318 in the NFET regions 428, 430, as shown inFIG. 5. A masking/resist material 532, 533 is then deposited/formed overthe mandrels 314, 318 in the NFET region(s) 428, 430 similar to thatdiscussed above with respect to FIG. 4. The exposed mandrel(s) 316within the PFET region 426 is then removed leaving the spacers 322, 323of this mandrel 316 on the pad layer 108, as shown in FIG. 6. Mandrelsmay be removed by a mandrel pull, which can include etching thepolysilicon or amorphous silicon that comprises the mandrels.

The masking/resist material 532, 533 covering the mandrels 314, 318 inthe NFET regions 428, 430 is removed, and an etching process such as RIEis performed on the pad layer 108 (if formed) as shown in FIG. 7. Themandrels 314, 318 and the spacers 422, 423 act as a masking layer thatprevent corresponding portions 734, 736, 738, 740 of the pad layer 108from being etch. The mandrels 314, 318 the spacers 422, 423 are thenremoved using an additional etching process. The portions 734, 736, 738,740 of the pad layer 108 are used as a masking layer while exposedportions of the semiconductor layer 106 are etched down to thedielectric layer 104, as shown in FIG. 8. If the pad layer 108 has notbeen previously formed it can be formed and patterned to create theportions shown in FIG. 7 prior to etching the exposed portions of thesemiconductor layer 106. The exposed portions of the semiconductor layer106 can be etched using RIE or any other suitable etching process.

This etching process forms a plurality of fins 842, 844 within the pFETregion(s) 426 of the wafer 102. These pFET fins 842, 844 each comprise aportion 846, 848 of the semiconductor (SiGe) layer 106. Each of the pFETfins 842, 844 has a thickness corresponding to the thickness of thesidewall spacers 422, 423 (and pad layer portion 736, 738 if formed).This etching process also defines semiconductor (SiGe) regions 850, 852for forming NFET fins, as discussed below. Each of the semiconductorregions 850, 852 comprises a portion 854, 856 of the semiconductor(SiGe) layer 106.

An additional etching process such as RIE is performed to remove theportions 734, 736, 738, 740 of the pad layer 108 (if formed) from thefins 842, 844 and the semiconductor regions 850, 852, as shown in FIG.9. A mask 958 is deposited over exposed regions of the dielectric layer104, the semiconductor regions 850, 852, and the fins 842, 844. The mask958 comprises nitride or another suitable material. A blocking/maskinglayer 1060 is formed over and around the pFET fins 842, 844 andcorresponding nitride 958 as shown in FIG. 10. The blocking/maskinglayer 1060 comprises a photoresist material or hard mask such as (butnot limited to) silicon nitride, oxide, oxinitride, etc. An etchingprocess is performed to remove the nitride 958 material from thesemiconductor regions 850, 852, as shown in FIG. 11. Theblocking/masking layer 1060 prevents the nitride 958 from being removedfrom the pFET fins 842, 844 during this etching process. After thisetching process the blocking/masking layer 1060 is removed from the pFETfins 842, 844 and corresponding nitride 958.

An epitaxy process is performed to grow strained Si layer 1262, 1264,1266, 1268 on the sidewalls of the semiconductor regions 850, 852comprising strained SiGe. For example, a selective epitaxy process canbe used to grow strained silicon on the exposed SiGe surface of thesemiconductor regions 850, 852, but does not grow silicon on dielectriclayers, such as nitride or oxide. Once the strained Si layers 1262,1264, 1266, 1268 have been formed, the semiconductor regions 850, 852are removed by an etching process such as (but not limited to) ahydrogen chloride etch as shown in FIG. 13. The etching process forms aplurality of fins 1370, 1372, 1374, 1376 within the NFET regions 428,430 of the wafer 102. The NFET fins 1370, 1372, 1374, 1376 comprise thestrained silicon 1262, 1264, 1266, 1268 formed during the epitaxyprocess discussed above. The nitride 958 is then removed from the PFETfins 842, 844 as shown in FIG. 14. The resulting wafer 102 comprisesboth SiGe fins 842, 844 and Si fins 1370, 1372, 1374, 1376 on the samewafer 102. The strained silicon fins 1370, 1372, 1374, 1376 provideenhanced electron mobility for the nFET devices, while the SiGe fins842, 844 reduce the threshold voltage of the pFET devices. Once the fins842, 844, are formed conventional fabrication process can be used tocreate devices implementing these fins.

FIG. 15 is an operational flow diagram illustrating a process forfabricating silicon and silicon germanium fins on the same semiconductorwafer. The operational flow diagram of FIG. 15 begins at step 1502 andflows directly to step 1504. A semiconductor wafer, at step 1504, isformed/obtained. The semiconductor wafer 102 comprises a substrate, adielectric layer 104 formed on the substrate, and a semiconductor layer106 formed on the dielectric layer 104. The semiconductor layer 106comprises silicon germanium (SiGe). At least one SiGe fin 842, at step1506, is formed from at least a first SiGe region 846 of thesemiconductor layer 106 in at least one PFET region 426 of thesemiconductor wafer 106. Strained silicon 1262, at step 1508, isepitaxially grown on at least a second SiGe region 854 of thesemiconductor layer 106. At least one strained silicon fin 1370, at step1510, is formed from the strained silicon 1262 in at least one NFETregion 428 of the semiconductor wafer 106. The control flow then exitsat step 1512.

FIG. 16 shows a block diagram of an exemplary design flow 1600 used forexample, in semiconductor IC logic design, simulation, test, layout, andmanufacture. Design flow 1600 includes processes and mechanisms forprocessing design structures or devices to generate logically orotherwise functionally equivalent representations of the designstructures and/or devices described above and shown in FIGS. 1-14. Thedesign structures processed and/or generated by design flow 1600 may beencoded on computer-readable transmission or storage media to includedata and/or instructions that when executed or otherwise processed on adata processing system generate a logically, structurally, mechanically,or otherwise functionally equivalent representation of hardwarecomponents, circuits, devices, or systems. Design flow 1600 may varydepending on the type of representation being designed. For example, adesign flow 1600 for building an application specific IC (ASIC) maydiffer from a design flow 1600 for designing a standard component orfrom a design flow 1600 for instantiating the design into a programmablearray, for example a programmable gate array (PGA) or a fieldprogrammable gate array (FPGA) offered by ALTERA® Inc. or XILINIX® Inc.

FIG. 16 illustrates multiple such design structures including an inputdesign structure 1620 that is preferably processed by a design process1610. Design structure 1620 may be a logical simulation design structuregenerated and processed by design process 1210 to produce a logicallyequivalent functional representation of a hardware device. Designstructure 1620 may also or alternatively comprise data and/or programinstructions that when processed by design process 1610, generate afunctional representation of the physical structure of a hardwaredevice. Whether representing functional and/or structural designfeatures, design structure 1620 may be generated using electroniccomputer-aided design (ECAD) such as implemented by a coredeveloper/designer. When encoded on a machine-readable datatransmission, gate array, or storage medium, design structure 1620 maybe accessed and processed by one or more hardware and/or softwaremodules within design process 1610 to simulate or otherwise functionallyrepresent an electronic component, circuit, electronic or logic module,apparatus, device, or system such as those shown in FIGS. 1-14. As such,design structure 1620 may comprise files or other data structuresincluding human and/or machine-readable source code, compiledstructures, and computer-executable code structures that when processedby a design or simulation data processing system, functionally simulateor otherwise represent circuits or other levels of hardware logicdesign. Such data structures may include hardware-description language(HDL) design entities or other data structures conforming to and/orcompatible with lower-level HDL design languages such as Verilog andVHDL, and/or higher level design languages such as C or C++.

Design process 1610 preferably employs and incorporates hardware and/orsoftware modules for synthesizing, translating, or otherwise processinga design/simulation functional equivalent of the components, circuits,devices, or logic structures shown in FIGS. 1-14 to generate a netlist1680 which may contain design structures such as design structure 1620.Netlist 1680 may comprise, for example, compiled or otherwise processeddata structures representing a list of wires, discrete components, logicgates, control circuits, I/O devices, models, etc. that describes theconnections to other elements and circuits in an integrated circuitdesign. Netlist 1680 may be synthesized using an iterative process inwhich netlist 1680 is resynthesized one or more times depending ondesign specifications and parameters for the device. As with otherdesign structure types described herein, netlist 1680 may be recorded ona machine-readable data storage medium or programmed into a programmablegate array. The medium may be a non-volatile storage medium such as amagnetic or optical disk drive, a programmable gate array, a compactflash, or other flash memory. Additionally, or in the alternative, themedium may be a system or cache memory, buffer space, or electrically oroptically conductive devices and materials on which data packets may betransmitted and intermediately stored via the Internet, or othernetworking suitable means.

Design process 1610 may include hardware and software modules forprocessing a variety of input data structure types including netlist1680. Such data structure types may reside, for example, within libraryelements 1630 and include a set of commonly used elements, circuits, anddevices, including models, layouts, and symbolic representations, for agiven manufacturing technology (e.g., different technology nodes, 32 nm,45 nm, 90 nm, etc.). The data structure types may further include designspecifications 1640, characterization data 1650, verification data 1660,design rules 1670, and test data files 1685 which may include input testpatterns, output test results, and other testing information. Designprocess 1610 may further include, for example, standard mechanicaldesign processes such as stress analysis, thermal analysis, mechanicalevent simulation, process simulation for operations such as casting,molding, and die press forming, etc. One of ordinary skill in the art ofmechanical design can appreciate the extent of possible mechanicaldesign tools and applications used in design process 1610 withoutdeviating from the scope and spirit of the invention. Design process1610 may also include modules for performing standard circuit designprocesses such as timing analysis, verification, design rule checking,place and route operations, etc.

Design process 1610 employs and incorporates logic and physical designtools such as HDL compilers and simulation model build tools to processdesign structure 1620 together with some or all of the depictedsupporting data structures along with any additional mechanical designor data (if applicable), to generate a second design structure 1690.Design structure 1690 resides on a storage medium or programmable gatearray in a data format used for the exchange of data of mechanicaldevices and structures (e.g., information stored in an IGES, DXF,Parasolid XT, JT, DRG, or any other suitable format for storing orrendering such mechanical design structures). Similar to designstructure 1620, design structure 1690 preferably comprises one or morefiles, data structures, or other computer-encoded data or instructionsthat reside on transmission or data storage media and that whenprocessed by an ECAD system generate a logically or otherwisefunctionally equivalent form of one or more of the embodiments of theinvention shown in FIGS. 1-14. In one embodiment, design structure 1690may comprise a compiled, executable HDL simulation model thatfunctionally simulates the devices shown in FIGS. 1-14.

Design structure 1690 may also employ a data format used for theexchange of layout data of integrated circuits and/or symbolic dataformat (e.g., information stored in a GDSII (GDS2), GL1, OASIS, mapfiles, or any other suitable format for storing such design datastructures). Design structure 1690 may comprise information such as, forexample, symbolic data, map files, test data files, design contentfiles, manufacturing data, layout parameters, wires, levels of metal,vias, shapes, data for routing through the manufacturing line, and anyother data required by a manufacturer or other designer/developer toproduce a device or structure as described above and shown in FIGS.1-14. Design structure 1690 may then proceed to a stage 1695 where, forexample, design structure 1690: proceeds to tape-out, is released tomanufacturing, is released to a mask house, is sent to another designhouse, is sent back to the customer, etc.

It should be noted that some features of the present invention may beused in one embodiment thereof without use of other features of thepresent invention. As such, the foregoing description should beconsidered as merely illustrative of the principles, teachings,examples, and exemplary embodiments of the present invention, and not alimitation thereof.

It should be understood that these embodiments are only examples of themany advantageous uses of the innovative teachings herein. In general,statements made in the specification of the present application do notnecessarily limit any of the various claimed inventions. Moreover, somestatements may apply to some inventive features but not to others.

The circuit as described above is part of the design for an integratedcircuit chip. The chip design is created in a graphical computerprogramming language, and stored in a computer storage medium (such as adisk, tape, physical hard drive, or virtual hard drive such as in astorage access network). If the designer does not fabricate chips or thephotolithographic masks used to fabricate chips, the designer transmitsthe resulting design by physical means (e.g., by providing a copy of thestorage medium storing the design) or electronically (e.g., through theInternet) to such entities, directly or indirectly. The stored design isthen converted into the appropriate format (e.g., GDSII) for thefabrication of photolithographic masks, which typically include multiplecopies of the chip design in question that are to be formed on a wafer.The photolithographic masks are utilized to define areas of the wafer(and/or the layers thereon) to be etched or otherwise processed.

The methods as discussed above are used in the fabrication of integratedcircuit chips.

The resulting integrated circuit chips can be distributed by thefabricator in raw wafer form (that is, as a single wafer that hasmultiple unpackaged chips), as a bare chip, or in a packaged form. Inthe latter case, the chip is mounted in a single chip package (such as aplastic carrier, with leads that are affixed to a motherboard or otherhigher level carrier) or in a multichip package (such as a ceramiccarrier that has either or both surface interconnections or buriedinterconnections). In any case, the chip is then integrated with otherchips, discrete circuit elements, and/or other signal processing devicesas part of either (a) an intermediate product, such as a motherboard, or(b) an end product. The end product can be any product that includesintegrated circuit chips, ranging from toys and other low-endapplications to advanced computer products (such as, but not limited to,an information processing system) having a display, a keyboard, or otherinput device, and a central processor.

As required, detailed embodiments of the present invention are disclosedherein; however, it is to be understood that the disclosed embodimentsare merely exemplary of the invention, which can be embodied in variousforms. Therefore, specific structural and functional details disclosedherein are not to be interpreted as limiting, but merely as a basis forthe claims and as a representative basis for teaching one skilled in theart to variously employ the present invention in virtually anyappropriately detailed structure. Further, the terms and phrases usedherein are not intended to be limiting; but rather, to provide anunderstandable description of the invention.

The terms “a” or “an”, as used herein, are defined as one as or morethan one. The term plurality, as used herein, is defined as two as ormore than two. Plural and singular terms are the same unless expresslystated otherwise. The term another, as used herein, is defined as atleast a second or more. The terms including and/or having, as usedherein, are defined as comprising (i.e., open language). The termcoupled, as used herein, is defined as connected, although notnecessarily directly, and not necessarily mechanically. The termsprogram, software application, and the like as used herein, are definedas a sequence of instructions designed for execution on a computersystem. A program, computer program, or software application may includea subroutine, a function, a procedure, an object method, an objectimplementation, an executable application, an applet, a servlet, asource code, an object code, a shared library/dynamic load libraryand/or other sequence of instructions designed for execution on acomputer system.

Although specific embodiments of the invention have been disclosed,those having ordinary skill in the art will understand that changes canbe made to the specific embodiments without departing from the spiritand scope of the invention. The scope of the invention is not to berestricted, therefore, to the specific embodiments, and it is intendedthat the appended claims cover any and all such applications,modifications, and embodiments within the scope of the presentinvention.

What is claimed is:
 1. A non-transitory computer readable medium encodedwith a program for fabricating silicon and silicon germanium fins on asemiconductor wafer comprising a substrate, a dielectric layer formed onthe substrate, and a semiconductor layer formed on the dielectric layer,the program comprising instructions configured to perform a methodcomprising: forming, in at least one pFET region of the semiconductorwafer, at least one SiGe fin from at least a first silicon germanium(SiGe) comprising region in the semiconductor layer; epitaxially growingstrained silicon on at least a second SiGe comprising region of thesemiconductor layer; forming at least one strained silicon fin from thestrained silicon in at least one nFET region of the semiconductor wafer;forming a pad layer on the semiconductor layer; forming a plurality ofmandrels, wherein at least a first mandrel is formed on a first portionof the pad layer over the first SiGe comprising region, and wherein atleast a second mandrel is formed on at least a second portion of the padlayer over the second SiGe comprising region; depositing a spacermaterial over the plurality of mandrels and portions of the pad layer;removing the spacer material from horizontal surfaces of the pluralityof mandrels and the portions of the pad layer, wherein the removingforms a first sidewall spacer and at least a second sidewall spacer oneach of the plurality of mandrels, and wherein the removing exposes theportions of the pad layer; removing the first and second sidewallspacers from the at least second mandrel, the removing exposing portionsof the pad layer under the first and second sidewall spacers; andremoving the at least first mandrel selective to the first and secondsidewall spacers of the at least first mandrel, the removing exposing aportion of the pad layer under the at least first mandrel, whereinforming the at least one SiGe fin comprises: etching the exposedportions of the pad layer, wherein the second portion of the pad layerremains under the at least second mandrel, and wherein the third portionof the pad layer remains under the first sidewall spacer of the firstmandrel and the fourth portion of the pad layer remains under the secondsidewall spacer of the first mandrel, wherein etching the exposedportions of the pad layer exposes portions of the semiconductor layer;after etching the exposed portions of the pad layer, removing at leastthe second mandrel, the first sidewall spacer of the first mandrel, andthe second sidewall spacer of the first mandrel; etching the exposedregions of the semiconductor layer, wherein the etching forms the at theleast one SiGe fin under the third portion of the pad layer and at leastone additional SiGe fin under the fourth portion of the pad layer; andremoving at least the third and fourth portions of the pad layer.
 2. Thenon-transitory computer readable medium of claim 1, wherein etching theexposed regions of the semiconductor layer forms the at least secondSiGe comprising region under the at least second portion of the padlayer.
 3. The non-transitory computer readable medium of claim 1,wherein epitaxially growing strained silicon comprises: removing the atleast second portion of the pad layer.
 4. The non-transitory computerreadable medium of claim 3, wherein epitaxially growing strained siliconfurther comprises: epitaxially growing strained silicon on verticalsurfaces of the at least second SiGe comprising region.
 5. Thenon-transitory computer readable medium of claim 4, wherein forming theat least one strained silicon fin comprises: selectively removing the atleast second SiGe comprising region after the strained silicon has beenepitaxially grown.